Description
Specifications:
Process chamber
- Material: aluminium
- Inside dimensions: 900 x 570 x 550 mm
- Volume: 282 liter
- Tray: 3, with dimensions 765 x 512 mm or custom design
Vacuum measurement: Baratron gauge
Generator: Custom design for Nanofics application
Pumping system: Dry pump group
PLC
The equipment and automatic processing is fully controlled by an industrial PLC.
The HMI (user interface) runs over an industrial touch panel PC having following properties:
- 17” touch screen.
- LED backlight.
- Integrated SSD hard drive.
The HMI offers following functionalities:
- Process & Instrumentation Diagram showing real-time machine status.
- User-level based log on for managing user rights from operator to engineer mode.
- Recipe management system offering unlimited number of recipes, each recipe representing a unique set of process parameters.
- Diagnostic functions.
- Alarm management.
- Optional historical data logging and viewing.
Electricity: 380V AC, 50Hz, 40A
Process gas
- 2 gas lines with MFC (Mass Flow Controller) for S coating
- 3 gas lines with MFC (Mass Flow Controller) for SE coating
Safety features: Emergency-off-switch, vacuum interlock, over temperature interlock, CE-label
Process gas connection: ¼’’-Swagelok-fitting, input pressure 1 Bar
