Europlasma CD600 Nanofics S/SE Nano Coating System

Cambridge Scientific ID: 21202 Category: Tag:



Process chamber

  • Material: aluminium
  • Inside dimensions: 900 x 570 x 550 mm
  • Volume: 282 liter
  • Tray: 3, with dimensions 765 x 512 mm or custom design

Vacuum measurement: Baratron gauge

Generator: Custom design for Nanofics application

Pumping system: Dry pump group


The equipment and automatic processing is fully controlled by an industrial PLC.

The HMI (user interface) runs over an industrial touch panel PC having following properties:

  • 17” touch screen.
  • LED backlight.
  • Integrated SSD hard drive.

The HMI offers following functionalities:

  • Process & Instrumentation Diagram showing real-time machine status.
  • User-level based log on for managing user rights from operator to engineer mode.
  • Recipe management system offering unlimited number of recipes, each recipe representing a unique set of process parameters.
  • Diagnostic functions.
  • Alarm management.
  • Optional historical data logging and viewing.

Electricity: 380V AC, 50Hz, 40A

Process gas

  • 2 gas lines with MFC (Mass Flow Controller) for S coating
  • 3 gas lines with MFC (Mass Flow Controller) for SE coating

Safety features: Emergency-off-switch, vacuum interlock, over temperature interlock, CE-label

Process gas connection: ¼’’-Swagelok-fitting, input pressure 1 Bar

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